MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition · Revised chapters that reflect the many recent advances in the field · Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology · In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. · Many more links to the Web · Problem sets in each chapter</P>
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本书为第二版。阅读章节：2, 4, 5: dry etching, wet etching, surface micromachining. 并做了此三章的课后题。这一版有目录，适合对着目录查漏补缺自我检查。第三版无目录，在第二版的基础上增加了额外的细节，如果想有更多了解，建议读第三版。
评分本书为第二版。阅读章节：2, 4, 5: dry etching, wet etching, surface micromachining. 并做了此三章的课后题。这一版有目录，适合对着目录查漏补缺自我检查。第三版无目录，在第二版的基础上增加了额外的细节，如果想有更多了解，建议读第三版。
评分本书为第二版。阅读章节：2, 4, 5: dry etching, wet etching, surface micromachining. 并做了此三章的课后题。这一版有目录，适合对着目录查漏补缺自我检查。第三版无目录，在第二版的基础上增加了额外的细节，如果想有更多了解，建议读第三版。
评分本书为第二版。阅读章节：2, 4, 5: dry etching, wet etching, surface micromachining. 并做了此三章的课后题。这一版有目录，适合对着目录查漏补缺自我检查。第三版无目录，在第二版的基础上增加了额外的细节，如果想有更多了解，建议读第三版。
评分本书为第二版。阅读章节：2, 4, 5: dry etching, wet etching, surface micromachining. 并做了此三章的课后题。这一版有目录，适合对着目录查漏补缺自我检查。第三版无目录，在第二版的基础上增加了额外的细节，如果想有更多了解，建议读第三版。
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