Post-Processing Techniques for Integrated MEMS

Post-Processing Techniques for Integrated MEMS pdf epub mobi txt 电子书 下载 2025

出版者:Artech House
作者:Sedky, Sherif
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页数:207
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出版时间:
价格:$ 111.87
装帧:HRD
isbn号码:9781580539012
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The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.

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