Soft X-Rays And Extreme Ultraviolet Radiation 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Attwood, David 作者

Cambridge Univ Pr

译者

2007-3 出版日期

470 页数

$ 81.36 价格

Pap

丛书系列

9780521029971 图书编码

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发表于2024-11-13

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Soft X-Rays And Extreme Ultraviolet Radiation 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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Soft X-Rays And Extreme Ultraviolet Radiation 在线电子书图书描述

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

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