Laser thermometry is based on the remote measurement of temperature-dependent parameters of solid bodies by means of a probing beam. The book examines the principles, special features and restrictions of some methods of non-contact temperature measurements of solida. Various laser methods are compared by means of several criteria important for practical application. Laser thermometry is applied in the conditions in which the commercial methods are ineffective: in the interaction of gas-discharge plasma, ion or laser beams with the surface, applying thin films and etching the microstructure of integrated circuits.
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