Microsystem Design 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2025

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Stephen D. Senturia 作者

Springer

译者

2005-7-29 出版日期

689 页数

USD 134.00 价格

Hardcover

丛书系列

9780792372462 图书编码

Microsystem Design 在线电子书图书标签: MEMS Engineering

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Microsystem Design 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2025

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Ch 1&2, 5-8, 11-13, 18&19, 21. Lumped modeling, linear/nonlinear system dynamics, elasticity, dissipation and thermal energy domain, lumped modeling of dissipative process, fluids, a piezoresistive pressure sensor, a capacitive accelerometer, a piezoelectric rate gyroscope. 本课项目：用COMSOL和LTSPICE做了一个CMUT, ieee格式论文。//系统那章好难啊~本科信号与系统没学好，这章差点看哭了

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Microsystem Design 在线电子书图书描述

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of 'good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work. The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases. This book is used for a graduate course in 'Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional. Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

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