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Dielectric Films for Advanced Microelectronics

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Baklanov, Mikhail (EDT)/ Green, Martin (EDT)/ Maex, Karen (EDT) 作者
John Wiley & Sons Inc
译者
2007-3 出版日期
508 页数
579.00 元 价格
HRD
丛书系列
9780470013601 图书编码

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发表于2024-11-13


Dielectric Films for Advanced Microelectronics 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

Dielectric Films for Advanced Microelectronics 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

Dielectric Films for Advanced Microelectronics 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024



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The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

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