Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Stephen A. Campbell 作者

Oxford University Press, USA

译者

2007-09-17 出版日期

672 页数

USD 89.95 价格

Paperback

丛书系列

9780195320176 图书编码

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教材之一。同时在类似课的系主任面前pre前选取了段落完成PECVD的细节补充，概念原理就不用说了，感觉就连实验细节都快背下来了…

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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite-the Silvaco Athena(R) set of codes-to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.

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