Extreme Ultraviolet Lithography 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Wu, Banqiu/ Kumar, Ajay 作者

译者

2009-5 出版日期

482 页数

$ 141.25 价格

丛书系列

9780071549189 图书编码

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发表于2024-11-09

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Extreme Ultraviolet Lithography 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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Extreme Ultraviolet Lithography 在线电子书图书描述

Master Extreme Ultraviolet Lithography Techniques Produce high-density, ultrafast microchips using the latest EUVL methods. Written by industry experts, Extreme Ultraviolet Lithography details the equipment, materials, and procedures required to radically extend fabrication capabilities to wavelengths of 32 nanometers and below. Work with masks and resists, configure high-reflectivity mirrors, overcome power and thermal challenges, enhance resolution, and minimize wasted energy. You will also learn how to use Mo/Si deposition technology, fine-tune performance, and optimize cost of ownership. Design EUVL-ready photomasks, resist layers, and source-collector modules Assemble optical components, mirrors, microsteppers, and scanners Harness laser-produced and discharge pulse plasma sources Enhance resolution using proximity correction and phase-shift Generate modified illumination using holographic elements Measure critical dimensions using metrology and scatterometry Deploy stable Mo/Si coatings and high-sensitivity multilayers Handle mask defects, layer imperfections, and thermal instabilities

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