Multi-wafer Rotating MEMS Machines

Multi-wafer Rotating MEMS Machines pdf epub mobi txt 電子書 下載2025

出版者:
作者:Lang, Jeffrey 編
出品人:
頁數:472
译者:
出版時間:2009-9
價格:$ 236.17
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isbn號碼:9780387777467
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The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

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