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椭圆光度法在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Fujiwara, Hiroyuki 作者

John Wiley & Sons Inc

译者

2007-1 出版日期

369 页数

1717.60元价格

HRD

丛书系列

9780470016084 图书编码

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椭圆光度法在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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椭圆光度法在线电子书图书描述

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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