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Reliability of Mems 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Hierold, Christofer 编作者

John Wiley & Sons Inc

译者

出版日期

324 页数

$ 255.00 价格

HRD

丛书系列

9783527314942 图书编码

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发表于2024-09-21

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Reliability of Mems 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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