Reliability of Mems

Reliability of Mems pdf epub mobi txt 电子书 下载 2025

出版者:John Wiley & Sons Inc
作者:Hierold, Christofer 编
出品人:
页数:324
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出版时间:
价格:$ 255.00
装帧:HRD
isbn号码:9783527314942
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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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