Computational Modeling in Semiconductor Processing 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Meyyappan, M. 编作者

译者

1995-1 出版日期

390 页数

$ 45.20 价格

丛书系列

9780890067079 图书编码

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Computational Modeling in Semiconductor Processing 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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Computational Modeling in Semiconductor Processing 在线电子书 pdf 下载 txt下载 epub 下载 mobi 在线电子书下载

Computational Modeling in Semiconductor Processing 在线电子书图书描述

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes. The work is intended for those new to the field of process and equipment simulation in electronics materials processing, and also for the experienced modeller. It also contains coverage suitable for graduate students in materials science, and chemical, mechanical and electrical engineering.

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