Physical Vapor Deposition of Thin Films 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Mahan, John E. 作者

译者

2000-2 出版日期

340 页数

1343.00 元价格

丛书系列

9780471330011 图书编码

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发表于2024-11-24

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Physical Vapor Deposition of Thin Films 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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Physical Vapor Deposition of Thin Films 在线电子书 pdf 下载 txt下载 epub 下载 mobi 在线电子书下载

Physical Vapor Deposition of Thin Films 在线电子书图书描述

A unified treatment of the theories, data, and technologies underlying physical vapor deposition methods With electronic, optical, and magnetic coating technologies increasingly dominating manufacturing in the high-tech industries, there is a growing need for expertise in physical vapor deposition of thin films. This important new work provides researchers and engineers in this field with the information they need to tackle thin film processes in the real world. Presenting a cohesive, thoroughly developed treatment of both fundamental and applied topics, Physical Vapor Deposition of Thin Films incorporates many critical results from across the literature as it imparts a working knowledge of a variety of present-day techniques. Numerous worked examples, extensive references, and more than 100 illustrations and photographs accompany coverage of:

* Thermal evaporation, sputtering, and pulsed laser deposition techniques

* Key theories and phenomena, including the kinetic theory of gases, adsorption and condensation, high-vacuum pumping dynamics, and sputtering discharges

* Trends in sputter yield data and a new simplified collisional model of sputter yield for pure element targets

* Quantitative models for film deposition rate, thickness profiles, and thermalization of the sputtered beam

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