Fundamental Principles of Optical Lithography 在線電子書 pdf 下載 txt下載 epub 下載 mobi 下載 2024

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Mack, Chris 作者

譯者

2008-1 出版日期

534 頁數

78.00 元價格

叢書系列

9780470018934 圖書編碼

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發表於2024-11-26

Fundamental Principles of Optical Lithography 在線電子書 epub 下載 mobi 下載 pdf 下載 txt 下載 2024

Fundamental Principles of Optical Lithography 在線電子書 epub 下載 pdf 下載 mobi 下載 txt 下載 2024

Fundamental Principles of Optical Lithography 在線電子書 pdf 下載 txt下載 epub 下載 mobi 下載 2024

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Fundamental Principles of Optical Lithography 在線電子書 pdf 下載 txt下載 epub 下載 mobi 在線電子書下載

Fundamental Principles of Optical Lithography 在線電子書圖書描述

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information:

Visiting http://www.lithoguru.com/textbook/index.htmlenhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

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