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Reactive Sputter Deposition 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Mahieu, S. 编作者

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出版日期

570 页数

$ 247.47 价格

丛书系列

9783540766629 图书编码

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发表于2024-11-10

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Reactive Sputter Deposition 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

Reactive Sputter Deposition 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Reactive Sputter Deposition 在线电子书图书描述

The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

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