An Introduction to Microelectromechanical Systems Engineering 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024


An Introduction to Microelectromechanical Systems Engineering

简体网页||繁体网页
Nadim Maluf 作者
Artech Print on Demand
译者
2000-11-30 出版日期
265 页数
USD 102.00 价格
Hardcover
丛书系列
9780890065815 图书编码

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An Introduction to Microelectromechanical Systems Engineering 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

An Introduction to Microelectromechanical Systems Engineering 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

An Introduction to Microelectromechanical Systems Engineering 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024



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An Introduction to Microelectromechanical Systems Engineering 在线电子书 图书描述

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

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