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Metal Impurities in Silicon-Device Fabrication 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Graff, Klaus 作者

Springer Verlag

译者

出版日期

268 页数

$ 190.97 价格

HRD

丛书系列

9783540642138 图书编码

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发表于2024-11-30

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Metal Impurities in Silicon-Device Fabrication 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

Metal Impurities in Silicon-Device Fabrication 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine the gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. This monograph provides a thorough review of the results of recent scientific investigations, as well as the relevant data and properties of the various metal impurities in silicon. The new edition includes important recent data and a number of new tables.

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