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RF Power for Industrial Applications 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2025

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Louis E. Frenzel 作者

Prentice Hall

译者

2003-05-31 出版日期

288 页数

USD 120.40 价格

Hardcover

丛书系列

9780130965776 图书编码

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发表于2025-01-02

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RF Power for Industrial Applications 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2025

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RF Power for Industrial Applications 在线电子书图书描述

For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power. This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others. This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge.

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