Electroceramic Based Mems 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Setter, Nava 编作者

Springer Verlag

译者

2005-3 出版日期

428 页数

$ 247.47 价格

HRD

丛书系列

9780387233109 图书编码

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发表于2024-11-13

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Electroceramic Based Mems 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

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Electroceramic Based Mems 在线电子书图书描述

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

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