Fundamental Principles of Optical Lithography 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

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Mack, Chris 作者

译者

2007-11 出版日期

534 页数

579.00元价格

丛书系列

9780470727300 图书编码

Fundamental Principles of Optical Lithography 在线电子书图书标签: IC

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Fundamental Principles of Optical Lithography 在线电子书 epub 下载 mobi 下载 pdf 下载 txt 下载 2024

Fundamental Principles of Optical Lithography 在线电子书 pdf 下载 txt下载 epub 下载 mobi 下载 2024

Fundamental Principles of Optical Lithography 在线电子书用户评价

评分☆☆☆☆☆

做computational litho的Bible吧，Chris Mack牛逼

评分☆☆☆☆☆

很冷门。

评分☆☆☆☆☆

很冷门。

评分☆☆☆☆☆

做computational litho的Bible吧，Chris Mack牛逼

评分☆☆☆☆☆

做computational litho的Bible吧，Chris Mack牛逼

Fundamental Principles of Optical Lithography 在线电子书著者简介

Fundamental Principles of Optical Lithography 在线电子书图书目录

Fundamental Principles of Optical Lithography 在线电子书 pdf 下载 txt下载 epub 下载 mobi 在线电子书下载

Fundamental Principles of Optical Lithography 在线电子书图书描述

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.htmlenhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB(r), to accompany the textbook. You can also contact the author and find help for instructors.

Fundamental Principles of Optical Lithography 在线电子书下载 mobi epub pdf txt 在线电子书下载

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